Parts For Sale AXCELIS 66551 AXCELIS 66551 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 66551 Manufacturer AXCELIS Part Number 66551 Description MANIFOLD AIR NOZZLES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other AXCELIS Parts 110121830 FEEDTHRY ASSEMBLY 11681436 536567 KIT THERMOCHUCK GPS II 208V W/CENTER PINS 11031080 3200363 VLV CRYO PURGE RLF 8033312CTI 170164512 FRONT STOCK PLATE 1766531 GRAPHITE, BURN-THRU SENSE PLATE ( VT 17121770 SCREW,REPELLER MOLYBDENUM 17064260 AXCELIS_17064260_GROUND ELECTRODE PLATE 72761 COVER PHOTO CELL 11636546 17319620 PADDING CAP