Parts For Sale AXCELIS 66541 AXCELIS 66541 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 66541 Manufacturer AXCELIS Part Number 66541 Description PLATE HANDLE MOUNT IRRAD Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other AXCELIS Parts 170159922 17287860 Graphite Cathode Support 170115870 17127650 Filament Shield 17099831 SHIELD FARADAY CUP (VGI) 170157233 170164646 110048680 ASSY WAFER PAD SENSOR 4400034 WASHER, LK #6, SPLIT, SST 100134120 KIT UPGRADE PRCS CHMBR GROUND 17S3432 Arc Chamber Front Slit 85331 MAGNETRON ASSY-LOW FREQUENCY, HITACHI HITACHI 2M131
