Parts For Sale AXCELIS 66541 AXCELIS 66541 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 66541 Manufacturer AXCELIS Part Number 66541 Description PLATE HANDLE MOUNT IRRAD Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other AXCELIS Parts 170162628 1200321 Filament Mounting Screw 170159922 17248070 Filament Bottom Support 17061991 APERTURE QUAD EXIT 680C0024; 170115870 170164646 3500163 O-RING VITON 214 110048680 ASSY WAFER PAD SENSOR 100134120 KIT UPGRADE PRCS CHMBR GROUND 17208240 TE Aaperature 1741070 APERT #2