Parts For Sale AXCELIS 66541 AXCELIS 66541 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 66541 Manufacturer AXCELIS Part Number 66541 Description PLATE HANDLE MOUNT IRRAD Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other AXCELIS Parts 17119360 GRA.SHIELD RESOLVING HOUS 170030780 Beam Stop 17320560 PLATE, LINER 17142890 AXCELIS TECHNOLOGIES INC BREAK THERMAL 4372500 8452-0007-0001 EATON AXCELIS NOVA NV6200 AUTOCOOL WAFER COOLING CHASSIS ... 17208240 TE Aaperature 5000132 Standoff, 3/8D X 3/8 L,6-32 496831 VACUUM VALVE ASSY-GES 170160061 170174465 170163417