Parts For Sale AXCELIS 563111 AXCELIS 563111 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 563111 Manufacturer AXCELIS Part Number 563111 Description VALVE ASSY-CHAMBER,PS3 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 IE Other AXCELIS Parts 170162628 17097340 Feed Strap, Filament 0141-0002-0001 ACTUATOR SGL SHFT 150PSI 078951 AXCELIS 078951 EMO BOX FRONT PLASTIC COVER 17306390 SERRATED PLATE PEP XE GSDIII/LED 17062350 GRAPHITE, HI VOLT PLATE, NV20 1104900 POWER SUPPLY,SUPPRESSION,1104900 17267060 GRAPHITE, FIXED APERTURE .16 IN, EATON CVA 17189150 AXCELIS PLATE CATHODE ELS SUPPORT GRAPHITE 00500003 Lambda EMI 00500003 Power Supply SX5025-5KV-NEG-DC-AIR-1 ... 100134120 KIT UPGRADE PRCS CHMBR GROUND 474M5E CAPACITOR
