Parts For Sale AXCELIS 563111 AXCELIS 563111 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 563111 Manufacturer AXCELIS Part Number 563111 Description VALVE ASSY-CHAMBER,PS3 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 IE Other AXCELIS Parts 48355112 Eaton 48355112 4700-0068-0001 MOTOR ASSY ROTATE TRANSFER LOW BACKLASH REV OPM: GM14606 ... 170165998 4440004 Varian-Eaton 4440004 Rack, Gas Module, Diss, DOM 170156677 ARM CHUCK 8" 17099661 Outer Beam Dump /AC 17122900 SHEILD EXIT INNER BAGGED 17394830 BOLT HEAD SHIELD 1 170164643 1741070 APERT #2 528121 PLATE ASSY 17248090 FILAMENT CLAMP RHC INSULATOR
