Parts For Sale AXCELIS 563111 AXCELIS 563111 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 563111 Manufacturer AXCELIS Part Number 563111 Description VALVE ASSY-CHAMBER,PS3 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 IE Other AXCELIS Parts 1181490 MKS 152-1025K, 150 ANGLE VALVE WITH NW25(1.0') ISO FLANG ... 549391 HV MODULE GEMINI GPL GES 170164332 17133400 Ref. Moly Box Liner, ELS Dual Vaporizer 17227050 APERTURE TERMINAL 17322400 Sourcing Bushing 4700-0003-0001 17192420 GROUND PLATE 17320000 APERTURE ENTRANCE BEAM TUNNEL 170049570 278662 EATON 278662 * USED * 170164636