Parts For Sale AXCELIS 563111 AXCELIS 563111 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 563111 Manufacturer AXCELIS Part Number 563111 Description VALVE ASSY-CHAMBER,PS3 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 IE Other AXCELIS Parts 17234200 AXCELIS MOLYBDENUM PLASMA CUP 266011 266011 COVER BODY HV TERMINAL 2 SLOT 0298-0178-0001 AXCELIS 0298-0178-0001 BRACKET 664991 1704990 Arc Chamber Side Plate 17192430 RING FIELD 170168776 17062350 GRAPHITE, HI VOLT PLATE, NV20 170157616 electrode feedthru cover(外) 170102980 1519670 INA 56151 RPL NONE (PCB ASSY CELL REAR PNL 20 (37) 17128740 SHIELD CLAMP RING