Parts For Sale AXCELIS 563111 AXCELIS 563111 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 563111 Manufacturer AXCELIS Part Number 563111 Description VALVE ASSY-CHAMBER,PS3 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 IE Other AXCELIS Parts 170165838 17119360 GRA.SHIELD RESOLVING HOUS 0342-1432-0001 FILAMENT SUPPLY ASSY MOD DTC 5000024 ELECTRODE, FACEPLATE CERAMIC STANDOFF, F 17253420 Heat Shield Gasket 120000700Z 300MM HE IMPLANTER LINAC FEEDTHRU 17D8878 AXCELIS GAS LINE ADAPTER (W) GSD 17D8878 B 17089711 AXCELIS ELECTRODE HIGH VGI 479131 DEVNET-NODE,PLASMA,GEN,ES3 AXCWHR31SERV Axcelis Wafer Handling Robot (ASSY FUSION) - Complete Ov ... 716281 KIT FUSE BOX 4400061 SCREW,6-32 X 5/8 S/H/C/S SST