Parts For Sale AXCELIS 5400-0001-4115 AXCELIS 5400-0001-4115 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 5400-0001-4115 Manufacturer AXCELIS Part Number 5400-0001-4115 Description O-RING Status Available Approx. Qty 23 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 23.0 US Other AXCELIS Parts 17127610 Shield, Insulator 17132290 Ground Electrode Insert 17165580 ARC SLIT 20R MOLY ELS/IAS 17170060 Electrode Spacer 4700-0003-0001 17320000 APERTURE ENTRANCE BEAM TUNNEL 170049570 278662 EATON 278662 * USED * 17182570 STRIKE PLATE (1) DISK 17C7701 AXCELIS_17C7701_OUTER STRIKER PLATE LINER(2) 170164636 1906850 IN-VAC ARM BELLOWS