Parts For Sale AXCELIS 101606 AXCELIS 101606 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 101606 Manufacturer AXCELIS Part Number 101606 Description WSHR FLAT SS #6 0.156 ID Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other AXCELIS Parts 11031080 17127590 ARC CHAMBER 0470-0001-0001 BEARING THRUST NEEDLE ROLLER 1.56 OD .33 THICK 17127650 Filament Shield 4400274 FLAG,GRAPHITE CUP SHEILD RETAINER SCREW, 0295-0044-0001 APERTURE SHUTTER DOWNSTREAM 1/2" SLOT ALUM 203669 BULB ASY-UV 200P H-MOD 8452-0007-0001 EATON AXCELIS NOVA NV6200 AUTOCOOL WAFER COOLING CHASSIS ... 269641 LUBRICANT NSK GREASE NO. 2 100134120 KIT UPGRADE PRCS CHMBR GROUND 17270190 SHIELD;17270190 UOM: PC 491641 KIT-COOLING RETROFIT AIM 491641