Parts For Sale AXCELIS 322181 AXCELIS 322181 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 322181 Manufacturer AXCELIS Part Number 322181 Description MOUNT DOOR CHAMBER 2XMCU Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 210000543 LVPS AC/DC 1500W 12V 28V 48V PS 716071 LIFT FIN LOADLOCK RECENTERING LOWER 17243830 Kapton Film Tube Potential 5990-0193-0001 PCB ASSY WAFER ALIGNE EATON 5990-0193-0001 17192390 SPACER GROUND ELECTRODE 4700-0068-0001 MOTOR ASSY ROTATE TRANSFER LOW BACKLASH REV OPM: GM14606 ... 170164512 FRONT STOCK PLATE 72761 COVER PHOTO CELL 1188490 SPINDLE DIRECT DRIVE ASSY W/CHARGE SENS 17F6732 AXCELIS_17F6732_LINER AMU BELLOWS 0399-0026-0001 BAFFLE MAGNET BEAM DUMP OUTER VGI 17359150 AXCELIS_17359150_LINER, INNER, STRIKER, PLATE