Parts For Sale AXCELIS 322181 AXCELIS 322181 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 322181 Manufacturer AXCELIS Part Number 322181 Description MOUNT DOOR CHAMBER 2XMCU Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 17123430 RETAINER (5/16 18) 170162054 0342-1052-0001 PCB ASSY SCAN SYSTEM 5936-0015-0002 Axcelis / Eaton: 5936-0015-0002 Bottom Magnet Pole Pla< 17338530 PLATE ELS SHIELD 17115930 Plate Aperture, Linac VG 17121750 INNER CUP SHIELD ELS 17270200 BLOCK, GRAPHITE EXIT AMU 170042741-C TRAY WAFER CERAMIC 1186811 MASTER OSCILLATOR 8452-0007-0001 EATON AXCELIS NOVA NV6200 AUTOCOOL WAFER COOLING CHASSIS ... 170162071