Parts For Sale AXCELIS 322181 AXCELIS 322181 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 322181 Manufacturer AXCELIS Part Number 322181 Description MOUNT DOOR CHAMBER 2XMCU Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 3300008 Thermocouple Vacuum Gauge Tube 170160087 17128110 Arc Slit, 15R Moly 170162161 110111850 NETWORK POWER MODULE 17115930 Plate Aperture, Linac VG 170159600 17384500 APERTURE RESOLVING 8, 14 & 22 Rev.C 3000321 FLTR WTR G78B2 CUNO 0342-0261-4001 0342-0259-3001 Axcelis 6200 COMPLETE Extraction ASSY insulator 7631-0001-0002 Ion Gauge Tube, 3/4" Kovar TT 028322 COMPRESSION SPRING