Parts For Sale AXCELIS 028322 AXCELIS 028322 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 028322 Manufacturer AXCELIS Part Number 028322 Description COMPRESSION SPRING Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 8.0 US Other AXCELIS Parts 66551 MANIFOLD AIR NOZZLES 1319413 EATON 1319413 PROTECTIVER COVER * NEW IN FACTORY BAG * 17119441 LINER - BELLOWS VG 2.80LG 17394930 ENTRANCE BEAM TUNNEL APERTURE REV.A 4710-0069-0001 MOUNT ARC CHAMBER REPELLER SIDE, ELS AXCELIS 4710-00 ... 17C4776 AXCELIS_17C4776_FILAMENT CLAMP (L) E41000136 1520300 PCB ASSY PLGR POSN SENSE 1550-0061-0001 ELECTRODE GROUND LOT OF 7 FOR 8250 AXCELIS 1550-0 ... 4400100 SCREW 6-32X1/2 S/H/C/S SST 1522270 PCB ASSY RESONATOR CONTROL DI 17D8601 Axcelis 17D8601 GROUND ELECTRODE