Parts For Sale AXCELIS 028322 AXCELIS 028322 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 028322 Manufacturer AXCELIS Part Number 028322 Description COMPRESSION SPRING Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 8.0 US Other AXCELIS Parts 0342-0684-4001 PCB ASSY I/O CARD ACK INTFC 17320560 PLATE, LINER 17236720 LINER, VG PUMP HOUSING 0483-0005-0001 BELT TIMING 115 GROOVES 5/16 W IFC-W-45 LU-A-402 Plate, Mtg, Electron Floof Assembly 17138750 FRONT SHIELD REFLECTOR VGI 17192420 GROUND PLATE 17270040 LINER (4) STRIKER PLATE FEM 17254970 FEEDTHROUGH SUPPRESSION GSD 0342-0311-1001 FEEDTHRU,CERAMIC,ACCEL/DECEL,0342-0311-1 17102651 VG MAGNET PLATE