Parts For Sale AXCELIS 028322 AXCELIS 028322 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 028322 Manufacturer AXCELIS Part Number 028322 Description COMPRESSION SPRING Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 8.0 US Other AXCELIS Parts 469431 END-EFFECTOR VACUUM ARM 3-AXIS ROBOT 17B8081 AXCELIS_17B8081_FIRST DEFINING APERTURE 17287850 Filament, ELS .040 1708680 INSULATOR, FILAMENTCERAMIC EGN APVE17036930 1522723 PCB ASSEMBLY TM990 310 I/O V.4 (1519930) 170154177 PLATE GRAPHITE 17158000 Cathode,Two piece Moly/Tungsten 251421 Axcelis Part Nbr: 251421 Flag Sensor for Rotation Mtr.< 1174740 VACUUM CASSETTE SENSOR 11S2945 GSD 3300138 GAUGE XMTR 30PSI MALE IPT122 17287870 Cathode Insulator Block