Parts For Sale AXCELIS 11S1551 AXCELIS 11S1551 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 11S1551 Manufacturer AXCELIS Part Number 11S1551 Description DISK ISOLATION VALVE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 SG Other AXCELIS Parts 170165838 17033341 Nozzle (DUAL VAP) 664991 3500027 O-Ring, Buna 17322400 Sourcing Bushing 17033150 BLOCK GRAPHITE 17033150 NV20A (EATON) 170168776 170157616 electrode feedthru cover(外) 6973-0002-6202 SCREW,CAP,HEX SOCKET,SST,6- 58636 170160841 7142-0015-0001 Axcelis / Eaton: 7142-0015-0001 Slit Beam Width Apertu<