Parts For Sale AXCELIS 170164864 AXCELIS 170164864 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164864 Manufacturer AXCELIS Part Number 170164864 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts APVE17121620A 17253420 Heat Shield Gasket 17248070 Filament Bottom Support 17335010 Ground Electrode 1 APVE17036930 590831 17127830 INSULATOR,FILAMENT FEEDTHROUGH 7631-0001-0002 Ion Gauge Tube, 3/4" Kovar TT 7435-0001-0001 Thermocouple Gauge Tube DV-6M Type 677511 58636 609132