Parts For Sale AXCELIS 170164266 AXCELIS 170164266 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164266 Manufacturer AXCELIS Part Number 170164266 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 17118510 GRAPHITE POLE SHORT ES QUAD VG 170163262 0843-0007-2001 Arc Chamber End Cap 170164255 1550-0052-0002 ELECTRODE-EXTRACTION NOTCHED SEN-EM 170174465 17D6525 Axcelis 17D6525 CATHODE CAP 1900400 Electron Shower Filament 170163204 1906850 IN-VAC ARM BELLOWS 170163417 170163410