Parts For Sale AXCELIS 170164266 AXCELIS 170164266 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164266 Manufacturer AXCELIS Part Number 170164266 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 17123430 RETAINER (5/16 18) 17253420 Heat Shield Gasket 1503020 PCB I/O MODULE TM0/310 NV 10-80 1503020 17287860 Graphite Cathode Support 170164281 590831 17033150 BLOCK GRAPHITE 17033150 NV20A (EATON) 170164646 17158000 Cathode,Two piece Moly/Tungsten 58636 668381 590752