Parts For Sale AXCELIS 170164266 AXCELIS 170164266 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164266 Manufacturer AXCELIS Part Number 170164266 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 17107960 SUPPORT FILAMENT 405241 Heater Window/Quartz Plate Lower Sapphire Coated 170163262 17335310 Filament Clamp Eterna ELS 170162620 170174465 170164318 464911 BELT, TIMING UPPER ROTATE 170163204 5880-1125-0001 PLATE, GND, SCAN SUPR PRIMARY 17182600 STRIKE PLATE (4) DISK FARADAY 170163410