Parts For Sale ULVAC Z30 ULVAC Z30 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details ULVAC Z30 Manufacturer ULVAC Part Number Z30 Description He COMPRESSOR Z30 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other ULVAC Parts UTM300 TMP, SET 1040511 CHUCK-ESC 1006098 GASKET,UFC-070,CF-40 1014673 END EFFECTOR 8 1024597 COLLAR INSULATION CAST HP F/T Ulvac ei-5K 1016731 BLOCK SEAL HP TC FD SIDES 1019283 RING UPPER SHIELD (2) 1003421 SENSOR, VACUUM ION GAUGE, WIB-G5 CRYO-U6H Pump ENTRON-EX W300 Multi-ch(8ch)Sputtering 1017446-01 TUBE DOWNSTREAM E-11