Parts For Sale THERMA-WAVE VL501 THERMA-WAVE VL501 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE VL501 Manufacturer THERMA-WAVE Part Number VL501 Description CTX Color Monitor Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used – IT Other THERMA-WAVE Parts 18-023624 Lower Heat Exchanger Assembly, Desorber 14-006060 PCB, AT A/D 79-017198 Lubricant, Kluber, NB5051 18-016169 Drive Assy, Motor, Vexta 18-010846 Motor/Gearbox Assy, UV 18-025241 Detector Assy, Universal2, A or B Array 45-025338 Load Port, 25 Slot, BTB WM, E84 (Customer dependent) 11-015446 Cable Assembly, THETA MTR Driver, OP2600 82-164189 TOOL,ALIGN,CENTER ISOLATOR