Parts For Sale THERMA-WAVE CQM1-CPU21-E THERMA-WAVE CQM1-CPU21-E Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE CQM1-CPU21-E Manufacturer THERMA-WAVE Part Number CQM1-CPU21-E Description Controllers Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used – IT Other THERMA-WAVE Parts 60-002590 Guard, Finger, Blower 21-008878 Driver, Laser Diode, 670nm - OP26XX only 18-012973 Lens Assy, White Light 45-025338 Load Port, 25 Slot, BTB WM, E84 (Customer dependent) 66-012995 Driver, Stepper Motor, UV (Vexta drivers for the stage) 18-022849 Power Supply, Fiber Optic Laser (see kit 61-023002, Kit ... 14-020539 PCB Assy, Z-Stage Autofocus 14-017532 PCB Assy, Multi Function 11-022412 Cable Assy, Power, 12V, LCD