Parts For Sale THERMA-WAVE 82-164189 THERMA-WAVE 82-164189 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details THERMA-WAVE 82-164189 Manufacturer THERMA-WAVE Part Number 82-164189 Description TOOL,ALIGN,CENTER ISOLATOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 DE Other THERMA-WAVE Parts 500038071 CP*DC4-10456 DC4 186469-300 11362100 233597001 18-015557 Detector Assy, BPE 14-007135 PCB, ASSY, AF, INTERCONNECT, AT 18-007478 Therma-Wave 18-007478 Sensor Module Rev. D Opti-Probe OP ... 500033385