Parts For Sale TENCOR INSTRUMENTS 156663 TENCOR INSTRUMENTS 156663 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TENCOR INSTRUMENTS 156663 Manufacturer TENCOR INSTRUMENTS Part Number 156663 Description ASSY, SHUTTER RT, S6200 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TENCOR INSTRUMENTS Parts 52-0895 ASSEMBLY XENON F5X FLIPPER 450669 NEW KLA-Tencor PN: 450669 Lamp Assembly? Quantox 64000? 314196 4 Channel Motor Control 118672 Description:Puck assembly -- BottomTool: P-XX 54364 Description:PCB Assy, Indexer - Currently unavailableToo ... 239240 Drive Controller Board 064009 Power Distribution Board. 088099 Photomultiplier Card. 439843 Scanner Box Interface. Alternate KLA-Tencor part #: 231703 213241 S751-211407-004 KLA/TENCOR CAL TILE WAFER V4