Parts For Sale TOKYO ELECTRON (TEL) V10-406978-4 TEL V10-406978-4 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL V10-406978-4 Manufacturer TOKYO ELECTRON (TEL) Part Number V10-406978-4 Description SHUTTLE ARM 6"R Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TOKYO ELECTRON Parts 3D10-200501-15 Line Mani, FRONT LARG ES1805-220135-13 RING EXT OUTER EPD QUARTZ 6X008XM-14111-TSC3 CLEANED DOU ... 3D10-150057-11 PLATE, COOLING 2LINE VDC 2105-120673-51 Quartz, Gas Exhaust 1B86-036493-13 240035751 Filter Gas MB024-019897-1 MB3M10-314246-11 027-001383-1 O-RING 1380-001406-14 AC SERVOMOTOR .. 62BM006DXEAS-E 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO