Parts For Sale TOKYO ELECTRON (TEL) SMM162-522ATEL TEL SMM162-522ATEL Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL SMM162-522ATEL Manufacturer TOKYO ELECTRON (TEL) Part Number SMM162-522ATEL Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 2.0 MY Other TOKYO ELECTRON Parts 027-101869-1 O-RING 1D10-406675-11 Vespel plug for Focus Ring (88DD) CT2986-401638-13 TOKYO ELECTRON ACT8 CT2986-401638-13 MISCROSWITCH SENSOR ... 1810-424952-13 LIFTER SPRING (8K-ESC) ES2L87-100720-13 TOKYO ELECTRON TEL LIMITED HIGH TEMP 4 ZONE CONTROLLER A ... 3M81-020273-14 TEL TG-550-I/F.EP 3M81-020273-14 BOARD ES1D05-300188-12 RING, INSULATOR (DRM) 1D10-101965-12 ELECTRODE BOTTOM, 8N-L2 (88DRM 2L87-093014-11 SMC TEL TOKYO ELECTRON MODIFY KIT ECE-202825 2L87-093014 ... 3M10-203064-11 PLATE-SUS SUS302332*174m 1981-604675-14 SOG Fan and Monitor Board #2, 1981-604675-14, TEL 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ...