Parts For Sale TOKYO ELECTRON (TEL) M10-402654-2 TEL M10-402654-2 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL M10-402654-2 Manufacturer TOKYO ELECTRON (TEL) Part Number M10-402654-2 Description ROLLER SHAFT Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other TOKYO ELECTRON Parts DS036-004631-1 THERMOCOUPLE..S1-K-HS1-1550 1B86-036493-13 1D10-406675-11 Vespel plug for Focus Ring (88DD) 1310-290967-11 AD EXH.PIPE(2) MB024-019897-1 DSMX4-008400-C ASSY T/C (THERMOCOUPLE) ES027-001662-1 O-RING 2110-342827-11 Base Plate 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO CS043-001275-1 LAMP CS heater 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ...