Parts For Sale TOKYO ELECTRON (TEL) M10-200135-3 TEL M10-200135-3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL M10-200135-3 Manufacturer TOKYO ELECTRON (TEL) Part Number M10-200135-3 Description UPPER ELECTRODE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 JP Other TOKYO ELECTRON Parts 1D10-101398-11 BAFFLE PLATE 1D10-204338-13 UPPER ELECTRODE TEL DRM 1B86-036493-13 1D10-406675-11 Vespel plug for Focus Ring (88DD) 1310-290967-11 AD EXH.PIPE(2) MB024-019897-1 012-000722-1 V, AIR..FPR-71-9.52-2-BR FUJIKIN 012-000722-1 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO 1B81-010255-11 11701 TEL PCB, INTERLOCK RELAY BOARD 2 1B81-010255-11 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ... DS012-007407-1 VALVE, VAC, VEC-S8-X0313