Parts For Sale TOKYO ELECTRON (TEL) M02-400071-1 TEL M02-400071-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL M02-400071-1 Manufacturer TOKYO ELECTRON (TEL) Part Number M02-400071-1 Description WAFER ROTARY GEAR A Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 JP Other TOKYO ELECTRON Parts 1D10-315183-15 DEP SHIELD TEL DRM 030-008176-1 PIN-CONNECTOR 16-02-0103Fe 1B86-036493-13 1D05-300052-13 RING INSULATOR A7 (DRM2) 1310-290967-11 AD EXH.PIPE(2) MB024-019897-1 1810-329523-11 RING, FOCUS INNER 250MM LLD SCCM 1910-426468-11 HOLDER GUIDE 1810-120531-13 ELECTRODE, UPPER 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO 1386-444581-11 SMC CDG1BN20-100-G79-XB9; SENSOR SCAN UP/DOWN RINSE SMC ... 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ...