Parts For Sale TOKYO ELECTRON (TEL) HPS-109 TEL HPS-109 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL HPS-109 Manufacturer TOKYO ELECTRON (TEL) Part Number HPS-109 Description PIPING P-D-POLY Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other TOKYO ELECTRON Parts 1B86-036493-13 1105-300773-14 ES1D86-003812-13 SENSOR, PC, PC2 WALL PT 3D10-100930-13 ESC 1310-290967-11 AD EXH.PIPE(2) 1D10-101551-11 Baffle Plate 8" MB024-019897-1 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO 1D10-305530-14 SI FOCUS RING DRM 6INCH 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ... 1810-120900-13 1810-120900-13 Electrode, Bottom 8"