Parts For Sale TOKYO ELECTRON (TEL) DSFE52 TEL DSFE52 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL DSFE52 Manufacturer TOKYO ELECTRON (TEL) Part Number DSFE52 Description TEMP CTL..MODEL560-Z/C Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 FR Other TOKYO ELECTRON Parts ES1D10-100938-12 RF PLATE,PC1 (DRM2) 1B86-036493-13 1310-290967-11 AD EXH.PIPE(2) 1910-430174-12 8 WAF BLOCK 5 (2P-45-F) MB024-019897-1 1810-221329-12 SHIELD RING T78K-160 DS043-000445-1 HEATER TAPE 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO 1810-328380-12 SHAFT RF(S85DI-C) 1880-026696-21 6" Carbon Etching Eletrode TE-5000 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ...