Parts For Sale TOKYO ELECTRON (TEL) DSFE52 TEL DSFE52 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL DSFE52 Manufacturer TOKYO ELECTRON (TEL) Part Number DSFE52 Description TEMP CTL..MODEL560-Z/C Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 FR Other TOKYO ELECTRON Parts 1D05-400028-22 WINDOW UP A-2 (DRM2) 1B86-036493-13 240035751 Filter Gas MB024-019897-1 MB3M10-314246-11 1D10-202204-12 UPPERELECTRODE Application: TEL(UNITYDRM) ES020-003418-1 Bolt Inside VAC 2981-600514-11 EXT DIO BOARD LITHO 028-003317-1 Quick Fitting 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ... ES880-020115-3 EJECTOR ZX1052-J26LZ-EC-X116