Parts For Sale TOKYO ELECTRON (TEL) CL028PXX TEL CL028PXX Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL CL028PXX Manufacturer TOKYO ELECTRON (TEL) Part Number CL028PXX Description FILTER ULPA Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP New 2.0 US Other TOKYO ELECTRON Parts 3D10-403978-12 TOKYO ELECTRON (TEL) 3D10-403978-12 PIN SUPPORT INSULA ... 1D10-309946-12 Focus Ring (inside step no polish) 1B86-036493-13 ES027-001460-1 O-RING FLUORINE D0270 AS568A-274 BLK 1310-290967-11 AD EXH.PIPE(2) 1910-426349-13 PIN (67) MB024-019897-1 1810-120660-13 PC UEL BODY UNITY Application: TEL 8500 043-000160-1 ISOPAD ITW/SS-55 3.M; HEATER, TAPE LPCHX JX 3020H 1TW SS ... 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ...