Parts For Sale TOKYO ELECTRON (TEL) A116654 TEL A116654 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL A116654 Manufacturer TOKYO ELECTRON (TEL) Part Number A116654 Description Screws Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other TOKYO ELECTRON Parts 1D10-309946-12 Focus Ring (inside step no polish) 1810-428037-11 BUSHING, RING SHIELD 1B86-036493-13 1D10-204418-12 BELLOW COVER Y203 1310-290967-11 AD EXH.PIPE(2) MB024-019897-1 DS027-000166-1 O-RING ES1D05-300354-11 RING, INSULATOR, A7 LA6-8 ULS, OUTER 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO ES3D05-300243-11 Cover ring 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ...