Parts For Sale TOKYO ELECTRON (TEL) 6101004 TEL 6101004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL 6101004 Manufacturer TOKYO ELECTRON (TEL) Part Number 6101004 Description HEATER UNIT Open Bag Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TOKYO ELECTRON Parts 1105-302130-41 QUARTZ SHUTTER ES1D10-100670-13 ELECTRODE UPPER QB FLAT 3D10-201448-21 TEL FOCUS RING,360-302-C 1B86-036493-13 1310-290967-11 AD EXH.PIPE(2) MB024-019897-1 1381-648241-12 PCB, TVB6003-1/EIMC 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO 024-014184-1 CYLINDER COATER ARM 1 NOZZLE LOCK 024-014184-1 (MHQ2-16D ... 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ... 1810-120900-13 1810-120900-13 Electrode, Bottom 8"