Parts For Sale TOKYO ELECTRON (TEL) 5022290 TEL 5022290 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEL 5022290 Manufacturer TOKYO ELECTRON (TEL) Part Number 5022290 Description ACTUATOR,ROT,AIR,1" Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other TOKYO ELECTRON Parts ES1D10-202204-12 UPPER ELECTRODE 1B86-036493-13 1810-120900-12 Tokyo TEL Unity ESC Process Chamber 1810-120900-12 with ... CT023-000585-1 BELT,TIMING 024-015804-1 Feedthru, Magnetic Coupled Vacuum IDC-92010609 MB024-019897-1 027-001383-1 O-RING 1910-426468-11 HOLDER GUIDE 5085-429552-11 CUP, BEVEL-300-306 ASSY PRO 1910-430029-11 NOZZLE COATER BACKSIDE NOZZLE 1910-430029-11 A3S6 TEL MK ... 2L86-052716-12 TOKYO ELECTRON LIMITED RL3A 2L86-052716 P-PIN PM AC MOTO ... 1810-120900-13 1810-120900-13 Electrode, Bottom 8"