Parts For Sale TEGAL MI-1215-00001 TEGAL MI-1215-00001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL MI-1215-00001 Manufacturer TEGAL Part Number MI-1215-00001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TEGAL Parts 40-768-004 Insulator Ring 47-155-001 40-395-001 RING, FLAT 6 46-787-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-563-001 47-080-003 41-271-002 40-295-003 FOCUS RING 15394-2 Spacer