Parts For Sale TEGAL F4854002 TEGAL F4854002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL F4854002 Manufacturer TEGAL Part Number F4854002 Description KIT, COOLING, PUMP, FITTING Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 40-467-001 39-741-026 Tegal 903e lower electrode 42-362-001 47-101-002 39-894-001 39-733-004 Tegal 903e lower electrode 41-387-001 52-047-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD.
