Parts For Sale TEGAL F4854002 TEGAL F4854002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL F4854002 Manufacturer TEGAL Part Number F4854002 Description KIT, COOLING, PUMP, FITTING Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TEGAL Parts 47-158-002 39-861-002 42-508-001 41-351-003 39-741-026 Tegal 903e lower electrode 40-295-003 FOCUS RING 37-524-001 40-790-001 FOCUS RING 32-388-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.