Parts For Sale TEGAL F4854002 TEGAL F4854002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL F4854002 Manufacturer TEGAL Part Number F4854002 Description KIT, COOLING, PUMP, FITTING Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TEGAL Parts 51-251-001 51-092-001 74-124-005 38-023-001 COOLING RING 42-326-002 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 42-960-003 40-295-003 FOCUS RING 37-222-002 Cooling Plate 46-556-002
