Parts For Sale TEGAL F4854002 TEGAL F4854002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL F4854002 Manufacturer TEGAL Part Number F4854002 Description KIT, COOLING, PUMP, FITTING Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 40-481-002 Insulator Ring 37-180-001 23-193-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 44-888-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 32-301-001 44-957-001 80-202-357 O-Ring