Parts For Sale TEGAL F4854002 TEGAL F4854002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL F4854002 Manufacturer TEGAL Part Number F4854002 Description KIT, COOLING, PUMP, FITTING Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TEGAL Parts 39-853-005 99-247-003 SPATULA INTERFACE 44-432-002 37-411-001 41-395-001 51-228-001 99-287-003 SHUTTLE INTERFACE BOARD 39-733-004 Tegal 903e lower electrode 39-741-009 Tegal 903e lower electrode 32-260-001 99-249-002 PCB TEGAL END POINT DETECTOR 32-356-001
