Parts For Sale TEGAL CM1104-00403 TEGAL CM1104-00403 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL CM1104-00403 Manufacturer TEGAL Part Number CM1104-00403 Description PRGM,MEM-VT20R,PSWRD CHNG900 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 42-1007-001 39-818-007 40-481-002 Insulator Ring 39-894-001 46-278-004 99-249-002 PCB TEGAL END POINT DETECTOR 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 150 mm 150 mm 25 slot Aluminum wafer carrier.