Parts For Sale TEGAL CM1104-00403 TEGAL CM1104-00403 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL CM1104-00403 Manufacturer TEGAL Part Number CM1104-00403 Description PRGM,MEM-VT20R,PSWRD CHNG900 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 41-113-001 80-195-450 40-295-003 FOCUS RING 39-733-004 Tegal 903e lower electrode 42-456-003 42-180-001/002 80-202-357 O-Ring 37-222-002 Cooling Plate 39-533-001 37-668-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
