Parts For Sale TEGAL CM1104-00403 TEGAL CM1104-00403 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL CM1104-00403 Manufacturer TEGAL Part Number CM1104-00403 Description PRGM,MEM-VT20R,PSWRD CHNG900 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-768-006 Insulator Ring 42-667-001 40-395-001 RING, FLAT 6 23-193-003 44-519-001 44-634-001 46-774-001 40-304-001 ELECTRODE, INSULATOR LOWER 40-296-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
