Parts For Sale TEGAL CD1310-00101 TEGAL CD1310-00101 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL CD1310-00101 Manufacturer TEGAL Part Number CD1310-00101 Description ENDPOINT MODULE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other TEGAL Parts 32-356-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 32-139-002 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 29-345-021 KIT, CONS-STARTUP, HRE 1.1 37-411-001 41-395-001 40-140-001 RING, CERAMIC INSULATOR 39-761-001 39-741-009 Tegal 903e lower electrode 32-260-001