Parts For Sale TEGAL CD1310-00101 TEGAL CD1310-00101 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL CD1310-00101 Manufacturer TEGAL Part Number CD1310-00101 Description ENDPOINT MODULE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other TEGAL Parts 47-158-002 52-058-002 39-861-002 99-247-003 SPATULA INTERFACE 40-481-002 Insulator Ring 41-351-003 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 46-925-001 39-733-004 Tegal 903e lower electrode 37-524-001 40-304-001 ELECTRODE, INSULATOR LOWER