Parts For Sale TEGAL 99-173-003 TEGAL 99-173-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-173-003 Manufacturer TEGAL Part Number 99-173-003 Description PCB Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 99-247-003 SPATULA INTERFACE 40-481-002 Insulator Ring 47-155-001 46-787-002 39-563-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-003 41-271-002 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 15394-2 Spacer 50-056-001