Parts For Sale TEGAL 99-173-003 TEGAL 99-173-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-173-003 Manufacturer TEGAL Part Number 99-173-003 Description PCB Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 161-0040K VALVE, INLINE VACUUM 99-247-003 SPATULA INTERFACE 40-395-001 RING, FLAT 6 80-195-450 80-1025-01 HEATER 39-741-026 Tegal 903e lower electrode 42-456-003 42-180-001/002 39-533-001 37-668-001