Parts For Sale TEGAL 99-173-003 TEGAL 99-173-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-173-003 Manufacturer TEGAL Part Number 99-173-003 Description PCB Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 58-073-001 40-467-001 39-741-026 Tegal 903e lower electrode 42-362-001 47-101-002 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 93-123-006 BELT 52-047-002 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE