Parts For Sale TEGAL 99-172-003 TEGAL 99-172-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-172-003 Manufacturer TEGAL Part Number 99-172-003 Description PCB, IMN-3 MATCH NTRFC Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 51-251-001 51-092-001 74-124-005 80-650-053 ACTUATOR 42-326-002 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 42-960-003 40-295-003 FOCUS RING 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 40-790-001 FOCUS RING 40-576-003-C Ring Ceramic Focus Castellated 46-556-002