Parts For Sale TEGAL 99-172-003 TEGAL 99-172-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-172-003 Manufacturer TEGAL Part Number 99-172-003 Description PCB, IMN-3 MATCH NTRFC Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 46-879-001 40-768-006 Insulator Ring 38-023-001 COOLING RING 80-650-053 ACTUATOR 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-695-001 50-056-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-735-004 Tegal 903e lower electrode 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%