Parts For Sale TEGAL 99-116-001 TEGAL 99-116-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-116-001 Manufacturer TEGAL Part Number 99-116-001 Description PCB, BOTTOM CONTROL PANEL BDP-1 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier. 33-349-004 ELECTRODE, CONDEHEAD UPPER 47-080-003 41-271-002 47-155-001 40-576-003-C Ring Ceramic Focus Castellated 46-787-002 15394-2 Spacer 39-563-001