Parts For Sale TEGAL 99-116-001 TEGAL 99-116-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-116-001 Manufacturer TEGAL Part Number 99-116-001 Description PCB, BOTTOM CONTROL PANEL BDP-1 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 39-735-008 ELECTRODE, LOWER ANODIZED 6" 39-735-004 Tegal 903e lower electrode 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 150 mm 150 mm 25 slot Aluminum wafer carrier. 29-345-021 KIT, CONS-STARTUP, HRE 1.1 46-1006-001 37-180-001 23-193-003 39-741-026 Tegal 903e lower electrode 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 32-301-001