Parts For Sale TEGAL 99-115-001 TEGAL 99-115-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-115-001 Manufacturer TEGAL Part Number 99-115-001 Description PCB EIC 1 Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 40-395-002 Ring Ceramic 125C Castellated 47-339-005 52-050-001 42-852-001 39-733-004 Tegal 903e lower electrode 52-041-001 39-750-001 39-735-004 Tegal 903e lower electrode 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL