Parts For Sale TEGAL 99-115-001 TEGAL 99-115-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-115-001 Manufacturer TEGAL Part Number 99-115-001 Description PCB EIC 1 Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other TEGAL Parts 47-155-001 46-787-002 39-563-001 47-080-003 41-271-002 80-202-357 O-Ring 15394-2 Spacer 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.