Parts For Sale TEGAL 99-115-001 TEGAL 99-115-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-115-001 Manufacturer TEGAL Part Number 99-115-001 Description PCB EIC 1 Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other TEGAL Parts 51-251-001 39-680-003 ELECTRODE, CONEHEAD VENTED 51-092-001 74-124-005 40-140-001 RING, CERAMIC INSULATOR 42-326-002 42-960-003 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 37-222-002 Cooling Plate 46-556-002