Parts For Sale TEGAL 99-115-001 TEGAL 99-115-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-115-001 Manufacturer TEGAL Part Number 99-115-001 Description PCB EIC 1 Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 40-467-001 42-362-001 47-101-002 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 52-047-002 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 150 mm 150 mm 25 slot Aluminum wafer carrier.