Parts For Sale TEGAL 99-111-001 TEGAL 99-111-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-111-001 Manufacturer TEGAL Part Number 99-111-001 Description PCB, SENSOR INTERFACE DRIVER SID-1 Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 5.0 US Other TEGAL Parts 58-073-001 40-467-001 39-741-026 Tegal 903e lower electrode 42-362-001 47-101-002 39-894-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 40-260-001 WINDOW, SAPPHIRE 1x2.5 52-047-002