Parts For Sale TEGAL 99-111-001 TEGAL 99-111-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-111-001 Manufacturer TEGAL Part Number 99-111-001 Description PCB, SENSOR INTERFACE DRIVER SID-1 Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 5.0 US Other TEGAL Parts 39-853-005 39-741-004 ELECTRODE, LOWER 6" 40-481-002 Insulator Ring 37-180-001 23-193-003 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 44-888-001 40-140-001 RING, CERAMIC INSULATOR 32-301-001 44-957-001 37-222-002 Cooling Plate