Parts For Sale TEGAL 99-082-003 TEGAL 99-082-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-082-003 Manufacturer TEGAL Part Number 99-082-003 Description PCB ASSY Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Unknown 1.0 US Other TEGAL Parts 46-879-001 31-406-003 WAFER SENSOR ASSY-VCE 47-583-001 47-695-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 41-362-002 32-415-002 40-576-003-C Ring Ceramic Focus Castellated 50-056-001 39-735-004 Tegal 903e lower electrode