Parts For Sale TEGAL 99-052-001 TEGAL 99-052-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-052-001 Manufacturer TEGAL Part Number 99-052-001 Description PCB, AUXILIARY AUX 1 Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 2.0 US Used 1.0 US Other TEGAL Parts 29-345-021 KIT, CONS-STARTUP, HRE 1.1 39-741-004 ELECTRODE, LOWER 6" 38-023-001 COOLING RING 37-180-001 23-193-003 39-741-026 Tegal 903e lower electrode 32-301-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 40-790-001 FOCUS RING 39-735-008 ELECTRODE, LOWER ANODIZED 6"
