Parts For Sale TEGAL 83-285-001 TEGAL 83-285-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-285-001 Manufacturer TEGAL Part Number 83-285-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-001 RING, FLAT 6 CR1144-00104 40-140-001 RING, CERAMIC INSULATOR CR1008-00408EX CR1008-00408EX 00-0917-2 5" GUIDE RING #G00-0917-2 1106915402 MOTOR AND PUMPP/N:1106915402 99-249-002 PCB TEGAL END POINT DETECTOR CR1008-00206RW 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 83-288-001