Parts For Sale TEGAL 81-006-013 TEGAL 81-006-013 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 81-006-013 Manufacturer TEGAL Part Number 81-006-013 Description PCB, 4 WAY SPLITER/COMB Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 46-994-002 47-442-001 31-406-003 WAFER SENSOR ASSY-VCE 41-502-001 44-981-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-002 42-941-001