Parts For Sale TEGAL 81-006-013 TEGAL 81-006-013 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 81-006-013 Manufacturer TEGAL Part Number 81-006-013 Description PCB, 4 WAY SPLITER/COMB Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 47-155-001 46-787-002 39-563-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 47-080-003 41-271-002 15394-2 Spacer