Parts For Sale TEGAL 81-006-013 TEGAL 81-006-013 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 81-006-013 Manufacturer TEGAL Part Number 81-006-013 Description PCB, 4 WAY SPLITER/COMB Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 32-139-002 29-345-021 KIT, CONS-STARTUP, HRE 1.1 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 99-247-003 SPATULA INTERFACE 37-411-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 41-395-001 93-123-006 BELT 32-260-001 40-790-001 FOCUS RING 40-576-003-C Ring Ceramic Focus Castellated 32-356-001