Parts For Sale TEGAL 81-006-010 TEGAL 81-006-010 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 81-006-010 Manufacturer TEGAL Part Number 81-006-010 Description PCB Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 41-113-001 40-395-002 Ring Ceramic 125C Castellated 39-680-003 ELECTRODE, CONEHEAD VENTED 80-195-450 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 42-456-003 42-180-001/002 39-533-001 37-668-001 150 mm 150 mm 25 slot Aluminum wafer carrier.