Parts For Sale TEGAL 80-506-10 TEGAL 80-506-10 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 80-506-10 Manufacturer TEGAL Part Number 80-506-10 Description E/P FILTER 901E Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 BE Other TEGAL Parts 58-073-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 42-1007-001 39-818-007 40-481-002 Insulator Ring 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-894-001 40-295-003 FOCUS RING 46-278-004 39-735-004 Tegal 903e lower electrode