Parts For Sale TEGAL 80-202-190 TEGAL 80-202-190 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 80-202-190 Manufacturer TEGAL Part Number 80-202-190 Description O-RING (TEGAL) Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 46-776-003 32-174-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 58-043-004 41-354-003 40-576-003-C Ring Ceramic Focus Castellated 44-439-001 55-008-001 BELT SPAT 43-074-001 150 mm 150 mm 25 slot Aluminum wafer carrier.