Parts For Sale TEGAL 80-200-567 TEGAL 80-200-567 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 80-200-567 Manufacturer TEGAL Part Number 80-200-567 Description BRG,CAM FDL 5/8 RLR Status Available Approx. Qty 17 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 17.0 US Other TEGAL Parts 51-251-001 51-092-001 74-124-005 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 42-326-002 99-287-003 SHUTTLE INTERFACE BOARD 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 42-960-003 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 46-556-002 150 mm 150 mm 25 slot Aluminum wafer carrier.