Parts For Sale TEGAL 80-200-567 TEGAL 80-200-567 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 80-200-567 Manufacturer TEGAL Part Number 80-200-567 Description BRG,CAM FDL 5/8 RLR Status Available Approx. Qty 17 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 17.0 US Other TEGAL Parts 47-155-001 46-787-002 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 39-563-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-003 41-271-002 15394-2 Spacer 150 mm 150 mm 25 slot Aluminum wafer carrier.