Parts For Sale TEGAL 46-947-001 TEGAL 46-947-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-947-001 Manufacturer TEGAL Part Number 46-947-001 Description PLATE, MTR MT-LDR/UNLDR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 46-437-002 52-058-002 32-315-001 39-761-001 41-334-001 41-405-001 40-304-001 ELECTRODE, INSULATOR LOWER 52-059-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 83-288-001