Parts For Sale TEGAL 46-947-001 TEGAL 46-947-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-947-001 Manufacturer TEGAL Part Number 46-947-001 Description PLATE, MTR MT-LDR/UNLDR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 39-853-005 51-251-001 51-092-001 74-124-005 42-326-002 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 99-287-003 SHUTTLE INTERFACE BOARD 42-960-003 39-733-004 Tegal 903e lower electrode 80-202-357 O-Ring 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 46-556-002