Parts For Sale TEGAL 46-532-003 TEGAL 46-532-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-532-003 Manufacturer TEGAL Part Number 46-532-003 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 80-650-053 ACTUATOR 51-191-001 46-786-001 39-741-026 Tegal 903e lower electrode 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-167-001 58-046-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE