Parts For Sale TEGAL 46-1801-002 TEGAL 46-1801-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1801-002 Manufacturer TEGAL Part Number 46-1801-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 51-259-003 51-191-001 46-786-001 52-050-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-167-001 40-304-001 ELECTRODE, INSULATOR LOWER 58-046-001 39-735-004 Tegal 903e lower electrode 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL