Parts For Sale TEGAL 46-178-001 TEGAL 46-178-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-178-001 Manufacturer TEGAL Part Number 46-178-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 58-053-001 40-768-006 Insulator Ring 39-680-003 ELECTRODE, CONEHEAD VENTED 80-195-450 51-056-001 00-0917-2 5" GUIDE RING #G00-0917-2 40-295-003 FOCUS RING 46-968-001 39-741-009 Tegal 903e lower electrode 51-178-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02
