Parts For Sale TEGAL 46-1036-001 TEGAL 46-1036-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1036-001 Manufacturer TEGAL Part Number 46-1036-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-768-004 Insulator Ring 51-251-001 51-092-001 40-481-002 Insulator Ring 51-270-002 40-140-001 RING, CERAMIC INSULATOR CR1144-00103 CR1144-00103 51-263-001 40-576-003-C Ring Ceramic Focus Castellated 80-202-357 O-Ring 37-222-002 Cooling Plate 52-175-001