Parts For Sale TEGAL 46-1030-002 TEGAL 46-1030-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-1030-002 Manufacturer TEGAL Part Number 46-1030-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 39-680-003 ELECTRODE, CONEHEAD VENTED 40-481-002 Insulator Ring 50-079-001 46-810-001 74-101-001 39-741-026 Tegal 903e lower electrode 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 39-741-009 Tegal 903e lower electrode 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 46-922-001