Parts For Sale TEGAL 42-871-002 TEGAL 42-871-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-871-002 Manufacturer TEGAL Part Number 42-871-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 46-1006-001 50-079-001 46-810-001 40-140-001 RING, CERAMIC INSULATOR 46-866-001 46-1000-001 40-295-003 FOCUS RING 93-123-006 BELT 40-790-001 FOCUS RING 46-922-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
